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Russia-based Zelenograd Nanotechnology Center (ZNTC) has finished the third research and development stage of its first lithography tool capable of processing 200-mm wafers using a 130nm process technology, reports CNews. Blogger Dmitrii Kuznetsov suggests this device is the "first Russian 130nm-capable lithograph" made of Russian components, though documents indicate Belarus-based Planar was responsible for developing the system and manufacturing its mechanical assemblies. Alexander Mikhailov, an analyst with Strategy Partners, told CNews that creating this prototype is a significant milestone demonstrating Russia’s engineering expertise for smaller process nodes like 90nm and 65nm.

The project received approximately $70 million from Russia’s Ministry of Industry and Trade. A single ZNTC stepper costs about $6.7 million, with the laser light source adding another $600,000 for a total near $7.3 million. This price reflects an inflation increase of roughly 88% compared to ASML’s PAS 5500/150 stepper, which cost $3.1 million when launched in Q1 2001. While Intel and AMD adopted 130nm technology in 2001 and 2002 respectively, their chips relied on ASML equipment. ZNTC claims responsibility for process modeling and development, but it remains unclear if the tool can integrate with existing nodes or invent new technology from scratch.

The machine is currently an engineering prototype delivered five months behind schedule and is years away from mass production. ZNTC must complete internal testing, finalize designs, and validate imaging and reliability before building machines for actual chipmakers. Even established suppliers typically take several years to move from engineering prototypes to production deployment. A realistic timeframe for the Russian machine to begin processing commercial wafers would probably be around 2029 at the earliest, according to industry standards for lithography tool development cycles.