AI-rewritten: This is a summary of an article from Tom’s Hardware, rewritten by AI (Qwen, running locally) to make it easier to read. The facts come from the original article – read it for the full story.

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Chinese chipmakers have accumulated an estimated 343 immersion DUV lithography tools between 2012 and early 2026, according to a report by the Centre for Technology & Statecraft (CTS). These machines can potentially be used to manufacture chips using 7nm-class process technologies. While Chinese firms cannot currently purchase ASML’s more advanced EUV systems, CTS asserts that this existing equipment gives them significant potential to produce sophisticated processors.

The report highlights a gap in current export controls because older lithography equipment can sometimes be reassigned for more complex manufacturing tasks. To address this, CTS proposes prohibiting all exports of immersion DUV systems to China and restricting replacement parts and maintenance services for advanced machines. This proposal aligns with the bipartisan MATCH Act introduced in April.

Specifically, CTS claims Chinese fabs own 270 ASML Twinscan NXT:1980i scanners, which feature a 38nm resolution and capabilities crucial for multipatterning at the 7nm level. Additionally, they own 22 NXT:2050i and six NXT:2000i systems. Although Dutch authorities introduced licensing requirements in September 2023 that effectively blocked shipments of more capable scanners, Chinese manufacturers purchased approximately 90 NXT:1980i units in 2024 and another 89 in 2025, spending over $13 billion during this period.